Electron beam device and electron beam application device using the same

摘要

To obtain a SEM capable of both providing high resolution at low acceleration voltage and allowing high-speed elemental distribution measurement, a SE electron source including Zr-O as a diffusion source is shaped so that the radius r of curvature of the tip is more than 0.5 mum and less than 1 mum, and the cone angle alpha of a conical portion at a portion in the vicinity of the tip at a distance of 3r to 8r from the tip, is more than 5° and less than (8/r)°. Another SE electron source uses Ba-O and includes a barium diffusion supply means composed of a sintered metal and a barium diffusion source containing barium oxide.