APPARATUS AND METHOD INCLUDING HEATING SOURCE REFLECTIVE FILTER FOR PYROMETRY,申请号EP20090730361-传众专利搜索

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发明名称	APPARATUS AND METHOD INCLUDING HEATING SOURCE REFLECTIVE FILTER FOR PYROMETRY
摘要
申请公布号	EP2279519(B1)	申请公布日期	2013.05.22
申请号	EP20090730361	申请日期	2009.04.03
申请人	APPLIED MATERIALS, INC.	发明人	RANISH, JOSEPH, M.;HUNTER, AARON, M.;KOELMEL, BLAKE, R.
分类号	H01L21/67	主分类号	H01L21/67
代理机构		代理人
主权项
地址

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