| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wafer conveying device in which efficient processing can be performed while maintaining the precision of processing such as inspection. <P>SOLUTION: An FPD inspection apparatus 1 comprises an optical unit 100 which applies imaging processing of a wafer W and a stage 11 on which the wafer W is placed and which conveys the wafer W. The FPD inspection apparatus 1 further comprises: a first conveyer 132 which is provided at an outer edge side in a conveying direction D of the stage 11 and holds and conveys the wafer W along with a conveyance shaft 131 extending in parallel with the conveying direction D; a second conveyer 142 which holds and conveys the wafer W along with a conveyance shaft 141 extending in parallel with the conveying direction D in the area where the wafer W gets over the optical unit 100, and has a higher movement resolution in comparison with the first conveyer 132; and a conveyance controller 35 which controls the conveyance of the wafer W in the first conveyer 132 and the second conveyer 142. <P>COPYRIGHT: (C)2013,JPO&INPIT |
