MONITORING APPARATUS AND METHOD THEREOF

摘要

PURPOSE: A monitoring device and a monitoring method are provided to extend the service time of an expensive wafer transfer robot and to improve productivity. CONSTITUTION: A monitoring device comprises a sensor unit(210), a control unit(230), a display unit(240), and a communication unit. The sensor unit is attached to a wafer transfer robot and measures sound signals generated when the robot is moved. The control unit sorts a band of signals generated by the movement of the robot among the measured sound signals, removes noise signals included in the sorted sound signals, and confirms whether the malfunction of components of the robot corresponding to a position where the sound signals are measured is existed or not. The display unit displays a result of the confirmation. [Reference numerals] (210) Sensor unit; (220) Storage unit; (230) Control unit; (240) Display unit; (250) Voice output unit