发明名称 STRUCTURE OF GAS INLET PORTION OF SCRUBBER
摘要 <P>PROBLEM TO BE SOLVED: To provide the structure of the gas inlet portion of a scrubber suppressing adhesion of deposit. <P>SOLUTION: The gas inlet portion 10 of a scrubber is composed of an annular outer cylindrical pipe 12, an inner cylindrical pipe 14 concentrically disposed inside the outer cylindrical pipe 12, an inlet device 16 concentrically disposed further inside the inner cylindrical pipe 14, and a gas introducing main pipe 18. The inlet device 16 is a cylindrical body with upper and lower parts opened. A gas flow passage 20 is formed for introducing the gas to be treated from an upper opening to the lower gas introducing main pipe 18. A water flow passage 30 formed between the inlet device 16 and the inner cylindrical pipe 14 is communicated with the gas flow passage 20 at a position lower than the lower end 32 of the inlet device 16, and an alkali aqueous solution flow passage 22 formed between the inner cylindrical pipe 14 and outer cylindrical pipe 12 is communicated with the gas flow passage 20 at a position lower than the lower end 24 of the inner cylindrical pipe 14. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013091026(A) 申请公布日期 2013.05.16
申请号 JP20110234443 申请日期 2011.10.25
申请人 NT CORP 发明人 OHAMA YOSHIRO;YUKIMATSU MASAHIKO;YOSHIDA MASAHIRO
分类号 B01D53/46;B01D53/18;B01D53/68;B01D53/77;H01L21/205 主分类号 B01D53/46
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