| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a screening device for a semiconductor device capable of specifying a semiconductor device indicating a singular value out of a main distribution even when a plurality of main distributions are included in a histogram of measurement values. <P>SOLUTION: A screening device for a semiconductor device has: a data division unit generating a plurality of measurement value subsets by dividing a measurement value set consisting of measurement results related to characteristics of the semiconductor device on the basis of a predetermined rule; a first evaluation value calculation unit calculating a first evaluation value that is an evaluation reference for the measurement results included in the plurality of respective measurement value subsets; a data conversion unit converting the measurement results included in the plurality of respective measurement value subsets on the basis of the first evaluation value; a second evaluation value calculation unit calculating a second evaluation value that is an evaluation reference for the measurement results after conversion by the data conversion unit; and a determination unit determining the quality of the semiconductor device that is a measurement target on the basis of the second evaluation value. <P>COPYRIGHT: (C)2013,JPO&INPIT |
