| 摘要 |
<p>In order to reduce the false detection of detector pixel coordinates when detector pixel coordinates corresponding to pixels are detected from detector pixel coordinates obtained from a scanned image, in a liquid crystal array inspection, wherein a test signal of a prescribed voltage is applied to a liquid crystal substrate to drive an array, secondary electrons obtained by irradiating the liquid crystal substrate with an electron beam are scanned, and the liquid crystal substrate array is inspected on the basis of a scanned image obtained as a result of the scan, by associating pixels corresponding to the liquid crystal substrate array with detector pixel coordinates obtained from the scanned image, in relation to signal processing for identifying pixels to be used in the array inspection, coordinate sequences having continuous detector pixel coordinates in columns are used as detector pixel coordinates that serve as a reference for associating the pixels on the liquid crystal substrate with the detector pixel coordinates obtained from the scanned image, instead of detector pixel coordinates at both ends in the column direction in the prior art.</p> |
