| 摘要 |
<p>PURPOSE: A vacuum process apparatus and a method for transferring an object are provided to secure high transfer efficiency in process conditions including process time, the number and the arrangement of all process rooms. CONSTITUTION: A loadlock(211) receives an object arranged in a standby part from a vacuum part. A process chamber(205-210) performs a process on the object connected to a transfer room(214,215,216). A transfer unit includes a vacuum robot(217-219). A middle room(212,213) connects the transfer unit. A gate valve(222-227) separates the inner space of a process chamber from the inner space of the transfer room.</p> |
