发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor device comprises: a semiconductor substrate; a channel region on the semiconductor substrate, the channel region comprising a quantum well structure; a source region and a drain region on two sides of the channel region; a gate structure on the channel region. The energy bands of the materials of the channel region, the source region, and the drain region are different from each other. A tunneling barrier structure exists between the source region and the channel region.
申请公布号 WO2013063726(A1) 申请公布日期 2013.05.10
申请号 WO2011CN01965 申请日期 2011.11.25
申请人 INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OFSCIENCES;YIN, HUAXIANG;LUO, JUN;ZHAO, CHAO;LIU, HONGGANG;CHEN, DAPENG 发明人 YIN, HUAXIANG;LUO, JUN;ZHAO, CHAO;LIU, HONGGANG;CHEN, DAPENG
分类号 H01L29/739;H01L21/336;H01L29/772 主分类号 H01L29/739
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