SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要
A semiconductor device comprises: a semiconductor substrate; a channel region on the semiconductor substrate, the channel region comprising a quantum well structure; a source region and a drain region on two sides of the channel region; a gate structure on the channel region. The energy bands of the materials of the channel region, the source region, and the drain region are different from each other. A tunneling barrier structure exists between the source region and the channel region.
申请公布号
WO2013063726(A1)
申请公布日期
2013.05.10
申请号
WO2011CN01965
申请日期
2011.11.25
申请人
INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OFSCIENCES;YIN, HUAXIANG;LUO, JUN;ZHAO, CHAO;LIU, HONGGANG;CHEN, DAPENG