TESTING DEVICE AND TESTING METHOD FOR QUANTUM BATTERY USING SEMICONDUCTOR PROBE

摘要

Provided are a device and method for testing of a quantum cell by a semiconductor probe, whereby the electrical characteristics of the charging layer can be evaluated during the quantum cell manufacturing process. The device is equipped with a semiconductor probe (50) constituted by a conductive electrode (54) and a metal oxide semiconductor layer (56) comprising a metal oxide semiconductor which are stacked on a support (52), a source of voltage (62) for applying voltage across an electrode (54) equipped to the semiconductor probe (50) and a base electrode (14) stacked on a secondary cell charging layer (18), and an ammeter (64) for measuring the current flowing beweeen the electrode (54) equipped to the semiconductor probe (50) and the base electrode (14) stacked on the secondary cell charging layer (18), and measures the current-voltage characteristics of the charging layer (18).