发明名称 RESIN SEALING MOLD APPARATUS AND RESIN SEALING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a resin sealing mold apparatus which allows a mold releasing film to adhere to an inner peripheral surface of a cavity part and achieves high molding accuracy even if the cavity part is deep. <P>SOLUTION: In a resin sealing mold apparatus, a substrate 16 on which electronic components 15 are mounted and a mold releasing film 14 are held by an upper mold 12 and a lower mold 20 where multiple cavity parts 23 are arranged parallel to each other on an upper surface thereof, and the electronic components 15 positioned in the cavity parts 23 are resin-sealed with a liquid resin 17 injected between the substrate 16 and the mold releasing film 14. In particular, suction grooves 24, each of which allows the cavity parts 23 of the lower mold 20 to communicate with each other, are provided and at least one suction hole is provided at each suction groove 24. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013084788(A) 申请公布日期 2013.05.09
申请号 JP20110223897 申请日期 2011.10.11
申请人 DAIICHI SEIKO CO LTD 发明人 OGATA KENJI;KITAMURA HIROYUKI
分类号 H01L21/56 主分类号 H01L21/56
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