| 摘要 |
A single thin plate storage container is provided so that an extremely thin wafer can be safely and reliably supported for easy insertion and removal. A single thin plate storage container 1 includes a main body 2 for storing one thin wafer A4 inside and a lid attached to the main body 2. The single thin plate storage container 1 includes a bottom side support member 35 that is located on the main body 2 side and supports the lid 3 from the bottom side, and a front side support member 36 that is located on the lid 3 side and supports the thin wafer 4A from the upper front side. The bottom side support member 35 includes a center support part 37 for supporting a center of the thin wafer 4A, an outer periphery support part 38 for supporting an outer periphery of the same, a peripheral edge support part 39 for supporting the same radially from outside, and a ring plate 40 for combining integrally the center support part 37 and the outer support part 38. The front side support member 36 includes a disc 43 for covering the thin wafer 4A from the upper side and abutting parts 44, 45 for supporting the thin wafer 4A in such a manner to sandwich the thin wafer 4A between the two abutting parts and the bottom side support member 35. |
