WASTE WORKING FLUID RECIRCULATION APPARATUS

摘要

Provided is a waste working fluid recirculation apparatus that is capable of suppressing the foaming of working fluid, and prevents wasteful working fluid consumption. Working fluid is supplied to a processing apparatus (1), and then the used working fluid is circulated and resupplied to the processing apparatus (1). The waste working fluid recirculation apparatus is provided with a primary tank (23) for collecting used working fluid, and a raw fluid tank (secondary tank; 14) for storing the used working fluid. A pipe (22) for connecting the primary tank (23) and the raw fluid tank (14) is filled with working fluid, and the end of the pipe (22) on the raw-fluid-tank (14) side is positioned at a location below the fluid surface in the raw fluid tank (14).