| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a current measuring device capable of measuring current while requiring no disconnection or change of wiring as the current measurement object in a high density semiconductor and without affecting circuit parameters. <P>SOLUTION: The current measuring device comprises: a magnetic flux detection device for detecting a magnetic flux generated by measured current; an integration device for converting an output voltage of the magnetic flux detection device into a current waveform; and a current waveform observation device for visualizing the current waveform. A magnetic flux detection device 10 has: a pair of first coils C1 formed in front-and-back symmetry, which are formed on both faces of a base substrate by a conductive pattern; and second coils C2 arranged linearly symmetrically to the first coils C1 in a position where wiring to be measured is disposed. Through holes penetrating the base substrate connect portions between conductive pattern ends of front winding ends and conductive pattern ends of back winding starts of the first coil C1 and the second coil C2, respectively, and portions between the conductive pattern end of the winding end of the first coil C1 and the conductive pattern end of the winding start of the second coil C2, respectively. <P>COPYRIGHT: (C)2013,JPO&INPIT |
