| 摘要 |
PURPOSE: An exterior measurement system and a method thereof are provided to correct vibration errors caused by a moving speed and vibration based on images obtained by a line-scan camera so that the errors, which are caused by different moving direction and different vibration, can be corrected by changing a line scanning direction of the line-scan camera even though a moving direction or a vibration direction is changed. CONSTITUTION: An exterior measurement system(1) comprises a first line scan camera(200), a second line scan camera(300), and a control system(100). The first line scan camera line-scans a substrate(10), which is transferred by a transferring device(20), in a first direction. The second line scan camera line-scans the substrate, which is transferred by the transferring device, in a second direction. The control system obtains the first length of the substrate in the second direction based on first images obtained by the first line scan camera and the second length of the substrate in the first direction based on second images obtained by the second line scan camera. [Reference numerals] (100) Control system;
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