| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a curable composition for imprint, improved in surface roughness of a cured film. <P>SOLUTION: A curable composition for imprint contains: (A) a polymerizable compound; (B) a polymerization initiator; and (C) a nonpolymerizable compound. The curable composition for imprint contains, as the nonpolymerizable compound (C), (C1) at least one kind of surfactants containing 20 mass% or more of fluorine atoms and (C2) at least one kind of polymers containing 3 mass% or more and less than 20 mass% of fluorine atoms and/or 5 mass% or more and less than 40 mass% of silicon atoms and having a weight average molecular weight (Mw) of 1,000-100,000. <P>COPYRIGHT: (C)2013,JPO&INPIT |
