| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a member separation apparatus that can productively separate members from each other to manufacture a high-quality product, and to provide a member separation method. <P>SOLUTION: According to one embodiment, a member separation apparatus includes a stage and an irradiation unit. The stage is configured to mount a workpiece. The workpiece includes a first member and a second member in contact with the first member. The first member is transmissive to light in a wavelength region including a first wavelength. The second member contacts with the first member. The second member has a higher absorptance for the light in the wavelength region than that of the first member for light of the first wavelength. The irradiation unit generates laser light containing a component of the first wavelength and a component of a second wavelength included in the wavelength region and different from the first wavelength, and irradiates the workpiece with the laser light. <P>COPYRIGHT: (C)2013,JPO&INPIT |
