| 摘要 |
PURPOSE: A detection device of distortion existed in data values which are obtained by using a scanning optical microscope and a method thereof are provided to use the data values obtained through a Z scanner, thereby detecting the distortion of the obtained data values without an extra external device. CONSTITUTION: A distortion detection unit(500) analyzes the change of sample data values in one or more scan line directions. The distortion detection unit detects at least one of the distortion of an incline of a sample existed in the same data values, the distortion of the hysteresis characteristic of the Z scanner, the distortion of the creep characteristic of the Z scanner. [Reference numerals] (500) Distortion detection unit; (510) Storage unit; (520) Distortion detection device |
