| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ink jet coating device capable of completely eliminating a white void defect due to non-discharge of a nozzle in a manufacturing process of a color filter by an ink jet system. <P>SOLUTION: A head unit 3 having one or more ink jet heads 14 having a plurality of nozzles, and a camera 5 for checking whether each opening on a substrate is normally coated and determining a coating abnormal part, are arranged on a stage 2 that holds the substrate. By carrying out a coating inspection while accompanying the final coating, the white void defect is immediately detected and also occurrence of non-discharge nozzle is detected. <P>COPYRIGHT: (C)2013,JPO&INPIT |
