| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a position detection device capable of accurately measuring a position even if ambient temperature and moisture change. <P>SOLUTION: Light, reflected by a beam splitter 3 in light transmitted through a collimator lens 2, is condensed on a light-receiving surface of a CCD 9 with a condensing lens 8. When a light source 1 is vibrated and a position of light beams is changed, the position of the light beams entering the CCD 9 changes, thereby, a vibrating center of the light beams from output variation of the CCD 9 can be determined. A control unit 10 detects the vibrating center, and controls voltage applied to a piezo element 11 for shaking the light source 1 so that the vibrating center becomes a predetermined position. <P>COPYRIGHT: (C)2013,JPO&INPIT |
