发明名称 |
Contrast for scanning confocal electron microscope |
摘要 |
A scanning confocal transmission electron microscope includes a descan deflector and a corrector below the sample. The microscope uses a detector that is preferably significantly larger than the resolution of the microscope and is positioned in the real image plane, which provides improved contrast, particularly for light elements. |
申请公布号 |
US8405027(B2) |
申请公布日期 |
2013.03.26 |
申请号 |
US201113182992 |
申请日期 |
2011.07.14 |
申请人 |
LAZAR SORIN;FREITAG BERT HENNING;TIEMEIJER PETER CHRISTIAAN;FEI COMPANY |
发明人 |
LAZAR SORIN;FREITAG BERT HENNING;TIEMEIJER PETER CHRISTIAAN |
分类号 |
G01N23/04 |
主分类号 |
G01N23/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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