发明名称 TRENCH TYPE POWER TRANSISTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 The present invention provides a trench type power transistor device including a semiconductor substrate, at least one transistor cell, a gate metal layer, a source metal layer, and a second gate conductive layer. The semiconductor substrate has at least one trench. The transistor cell includes a first gate conductive layer disposed in the trench. The gate metal layer and the source metal layer are disposed on the semiconductor substrate. The second gate conductive layer is disposed between the first gate conductive layer and the source metal layer. The second gate conductive layer electrically connects the first gate conductive layer to the gate metal layer, and the second gate conductive layer is electrically insulated from the source metal layer and the semiconductor substrate.
申请公布号 US2013069143(A1) 申请公布日期 2013.03.21
申请号 US201113237940 申请日期 2011.09.21
申请人 YEH TENG-HAO;LIAO SHIAN-HAU;CHEN CHIA-HUI;TAI SUNG-SHAN;SINOPOWER SEMICONDUCTOR INC. 发明人 YEH TENG-HAO;LIAO SHIAN-HAU;CHEN CHIA-HUI;TAI SUNG-SHAN
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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