发明名称 |
APPARATUS AND METHOD FOR COMBINATORIAL PLASMA DISTRIBUTION THROUGH A MULTI-ZONED SHOWERHEAD |
摘要 |
A multi-zone, combinatorial, single wafer showerhead is used to concurrently develop hardware, materials, unit processes, and unit process sequences. The multi-zone, combinatorial, single wafer showerhead utilizes showerhead pucks to perform process sequences on isolated regions of a single substrate. The showerhead pucks are designed so that they are easily interchangeable to allow the characterization of the interaction between hardware characteristics, process parameters, and their influence on the result of the process sequence. |
申请公布号 |
WO2012173845(A3) |
申请公布日期 |
2013.03.21 |
申请号 |
WO2012US41151 |
申请日期 |
2012.06.06 |
申请人 |
INTERMOLECULAR, INC.;ENDO, RICHARD;CHILD, KENT, RILEY |
发明人 |
ENDO, RICHARD;CHILD, KENT, RILEY |
分类号 |
H01L21/205 |
主分类号 |
H01L21/205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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