| 摘要 |
The present invention relates to an apparatus for MOCVD (metal organic chemical vapor deposition) which is a metal-organic vapour deposition method used in the production of LEDs, wherein the apparatus is provided with: a chamber; a boat which is disposed in the middle of the inside of the chamber and on which rests a wafer; a drive means for making the boat rotate in either a clockwise direction or an anticlockwise direction; a reaction-member-supply means whereby a reaction gas or source is supplied into the chamber; and a gas discharge means for discharging the gas, which flows inside the chamber, to the outside of the chamber. Also, the boat may comprise: at least two plates which are stacked with a predetermined height interval in between, and are equipped with wafer holders for allowing wafers to rest on the upper surfaces thereof; at least two props which are stood up straight in the height direction of the boat, and are adapted to secure the plurality of plates and supply a high-frequency current; and a base plate which is secured to the props while bridging underneath the lowermost-positioned plate, with a predetermined height interval in between; and, preferably, the drive means comprises a drive motor wherein the upper end of the motor shaft passes through the lower surface of chamber and is then secured to the centre of the bottom surface of the base plate. Also, the plates may comprise: an outer plate comprising a ceramic material; and a top-surface plate which lies over the upper surface of the outer plate, comprises a silicon carbide (SiC) or tungsten material and is provided with a wafer holder of which the upper surface is sunken in concave fashion; and, inserted into the outer plate, there is a circular high-frequency-heating heater which is wound into a coil shape. Also, a first brush and a second brush that touch a first electrode and a second electrode project from the bottom surface of the base plate which faces the first electrode and the second electrode. Also, the first prop and the second prop transmit high-frequency current, that has been transmitted from the first and second brushes, via the first prop and the second prop to the circular high-frequency-heating heater which is wound into the coil shape. Also, fitted between the base plate and the chamber bottom surface there is an electrode separator which is secured to the bottom surface of the chamber and is penetrated at its centre by the motor shaft, in which state it touches the first and second brushes and supplies high-frequency current via the first and second brushes to the circular high-frequency-heating heater. Here, installed on the upper surface of the electrode separator there are: a first electrode which is constituted in a round shape, supplies high-frequency current and touches the first brush; and a second electrode which is constituted in a round shape that is either larger or smaller than the rotational radius of the first electrode and, without making contact with the first electrode, supplies high-frequency current and touches the second brush. |
