| 摘要 |
PURPOSE: A hydrogen sensor on the basis of a polyaniline nano fiber and porous silicon carbide and a manufacturing method thereof are provided to improve hydrogen sensitivity at room temperature, stability, and ease of fabrication and to solve the instability at high temperatures and weak adhesion of the polyaniline nano fiber. CONSTITUTION: A hydrogen sensor on the basis of a polyaniline nano fiber and porous silicon carbide comprises a silicon substrate(11), a porous silicon carbide thin film(12), a polyaniline nano fiber(13), a first electrode(14a), a second electrode(14b), and a silver wire(15). The porous silicon carbide thin film is formed on the upper substrate. The polyaniline nano fiber is formed in one side of the upper porous silicon carbide thin film. The first electrode is formed on the upper polyaniline nano fiber. The second electrode is formed on the upper porous silicon carbide thin film by the other side of the polyaniline nano fiber. The silver wire is connected with the upper electrode.
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