发明名称 |
High-speed electrostatic actuation of MEMS-based devices |
摘要 |
A micro-electro mechanical device includes a first structure, a second structure offset from the first structure by a gap. The first structure is configured to be electrostatically actuated to deflect relative to second structure. A pulse generator is configured to combine at least two different pulses to electrostatically drive at least one of the first structure and the second structure between an initial position and a final position. |
申请公布号 |
US8395877(B2) |
申请公布日期 |
2013.03.12 |
申请号 |
US20090370356 |
申请日期 |
2009.02.12 |
申请人 |
POZIDIS CHARALAMPOS;PANTAZI ANGELIKI;SEBASTIAN ABU;SAHOO DEEPAK RANJAN;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
POZIDIS CHARALAMPOS;PANTAZI ANGELIKI;SEBASTIAN ABU;SAHOO DEEPAK RANJAN |
分类号 |
G02B26/00;G02B26/02 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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