| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid ejection head that can control deformation of a flow channel shape and variation of the shape and prevent generation of residues, while achieving simplification of the process. <P>SOLUTION: A flow channel pattern (18) containing a concave part (20) to become a flow channel and a convex part to become a sidewall part of the flow channel is formed on a substrate (12) where the energy generation element (10) is formed (Fig.1 (d)). A dry film resist (26) that has a laminated structure of a nonphotosensitive material layer (22) and a photosensitive resin layer (24) to coat the flow channel pattern (18) while leaving the concave part (20) in a hollow state is formed overlaying on the flow channel pattern (18) on the substrate (12) (Fig.1 (e)). A nozzle opening (28) is formed by removing a part of the photosensitive resin layer (24) of this dry film resist (26) (Fig.1 (f)). Then, the nonphotosensitive material layer (22) remained inside the nozzle opening is removed by dry etching and a liquid-repellent layer (30) is formed in the surface of the photosensitive resin layer (24) (Fig.1 (g)). <P>COPYRIGHT: (C)2013,JPO&INPIT |
