| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transmission X-ray analyzing apparatus and method capable of easily and widely adjusting the integration stage number of a TDI sensor when using the TDI sensor to detect a transmission X-ray image of a sample. <P>SOLUTION: A transmission X-ray analyzing apparatus for detecting a transmission X-ray image of a sample 100 that relatively moves in a predetermined direction L comprises; a time-delay-integration TDI sensor 14 that comprises multiple two-dimensionally-arrayed imaging devices for retrieving electric charge generated by applying photoelectric conversion to an image derived from the transmission X-ray image, includes multiple stages of line sensors 14a to 14h which are aligned in a scanning direction and include the imaging devices arrayed in a direction vertical to the scanning direction, and transfers the electric charge accumulated in one line sensor to an adjacent line sensor; shielding means 21 that is arranged between the TDI sensor and the sample, and partially shields an image entering the TDI sensor by moving forward and backward in the scanning direction; and the shielding means position control means that controls a position of the shielding means so as to shield the predetermined stage number of the line sensors. <P>COPYRIGHT: (C)2013,JPO&INPIT |
