发明名称 METHOD FOR CYLINDRICAL GRINDING OF FOUR ROUND CORNER FACES OF SQUARE POLE-LIKE INGOT
摘要 <P>PROBLEM TO BE SOLVED: To provide a chamfering method capable of shortening a chamfering time of four round corner faces of a square pole-like silicon ingot. <P>SOLUTION: The method includes the steps of spacing a height between a pair of longitudinally movable grinding wheel spindles 11o, 11o bearing cup wheel type grinding stones 11g, to cutting edges of the cup wheel type grinding stones 11g, 11g to start in-feed grinding of the workpiece while rotating the C-axis center of a workpiece supported between a headstock 7a and a tailstock 7b of a clamping mechanism 7 mounted onto a work table by 26 degrees back and forth in a swinging manner, and passing the swinging workpiece between the cup wheel type grinding stones 11g, 11g to chamfer the round faces of the workpiece by traverse grinding. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013035079(A) 申请公布日期 2013.02.21
申请号 JP20110170635 申请日期 2011.08.04
申请人 OKAMOTO MACHINE TOOL WORKS LTD 发明人 SAITO KOJI;KOBAYASHI KAZUO;IDE SATORU;KUBO TOMIO
分类号 B24B9/00;B24B41/06;B24B51/00;H01L21/304 主分类号 B24B9/00
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