发明名称 ELECTRIC COOLING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To prevent exhaust of cooling air from negatively affecting a temperature of a device installation room even when the cooling air is used in a device. <P>SOLUTION: An electric cooling device includes: a cooling division box including cooling division means which divides a workpiece along a division planned line formed on the workpiece by expanding and cooling an extension tape to which the workpiece is applied; and an electric box for consolidating electric control units of each driving part. The cooling division box includes a cooling air for sending pipe sending the used cooling air to the electric box. This structure prevents the cooling air from being directly exhausted to a device installation room and also prevents a negative effect on a temperature of the device installation room. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013038203(A) 申请公布日期 2013.02.21
申请号 JP20110172712 申请日期 2011.08.08
申请人 DISCO ABRASIVE SYST LTD 发明人 OZAWA AKIO
分类号 H01L21/301 主分类号 H01L21/301
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