RECIPE GENERATING DEVICE, INSPECTION ASSISTING DEVICE, INSPECTION SYSTEM, AND RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To analyze information recorded in a design layout directly, extract a desired area, and use the extraction method to generate an inspection recipe and to accomplish inspection in an efficient manner.

SOLUTION: Hierarchical information in design layout data is analyzed. The frequency of reference within the design layout data is calculated for each of cells that constitute internal data. The cells are rearranged in order of greatest frequency of reference. A target is searched. A high-ranking cell thereof is tracked. Thereby, area extraction of a desired circuit module, such as a memory mat, is facilitated.

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