发明名称 GAS GENERATOR AND GAS GENERATING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a gas generator and a gas generating method capable of changing the density of a sample gas in a wide range without changing an emission source. <P>SOLUTION: A gas generator 10 has an emission source for emitting a chemical substance relevant to an inspection object in a column 30 to generate a sample gas by introducing a dilution gas. An emission source 31 including a container 31a containing a chemical substance and a lid 31b disposed above the container 31a is used as an emission source. The lid 31b of the emission source 31 is displaced by a drive unit 35 and a shaft 37 to adjust a gap between the lid 31b and the container 31a so as to adjust the amount of the chemical substance emitted from the emission source 31. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013029365(A) 申请公布日期 2013.02.07
申请号 JP20110164478 申请日期 2011.07.27
申请人 FUJITSU LTD 发明人 ITO RYOJI
分类号 G01N1/00 主分类号 G01N1/00
代理机构 代理人
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