发明名称 DEVICE TO LOAD TEM SAMPLE HOLDERS INTO A VACUUM CHAMBER
摘要 A device is described that allows for the insertion and removal of a Transmission Electron Microscope (TEM) specimen stage and insertion rod into and out of a vacuum chamber. The device can be configured to accommodate specimen stage and insertion rods manufactured by all TEM producers. The device has a side-entry slot for accepting the cylindrical stage rod and a locking mechanism, such that unwanted contact with the specimen and the specimen stage itself is avoided during entry and exit from the plasma vacuum chamber. The devices hold said specimen stage and insertion rod in position during the process of plasma cleaning in a vacuum chamber.
申请公布号 US2013032732(A1) 申请公布日期 2013.02.07
申请号 US201213555632 申请日期 2012.07.23
申请人 SAFAR GEORGE 发明人 SAFAR GEORGE
分类号 G21K5/10 主分类号 G21K5/10
代理机构 代理人
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