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申请公布号
JP5139269(B2)
申请公布日期
2013.02.06
申请号
JP20080511205
申请日期
2006.05.05
申请人
发明人
分类号
H01L27/10;H01L21/3205;H01L21/768;H01L23/522
主分类号
H01L27/10
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