Ceramic plasma reactor and reaction apparatus

摘要

The ceramic plasma reactor includes: a plurality of unit electrodes each of which comprises a plate-shaped ceramic dielectric body 4 and a conductive film 3 embedded in the ceramic dielectric body superimposing them each other with a gap which works as a discharge portion 11, and preferably being formed by sandwiching one unit electrode 2b having no through holes 15 by two unit electrodes having plural through holes 2a there between. A partition wall plate 9 is provided by facing one of unit electrodes on a side opposite to the gap and being held by a holding member 7 at a predetermined distance so as to form there between a gas introducing-circulating portion 21 for introducing and circulating gas in the through-holes 15 so as to send gas introduced to the gap between the unit electrodes as a discharge portion by applying a voltage thereto to generate plasma.