| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a screen printing apparatus which can align a substrate with a mask plate in high positional precision by excluding a displacement error caused by the mechanical error of the lift driving mechanism of a substrate positioning part, and to provide a screen printing method. <P>SOLUTION: The substrate positioning part 1 is controlled on the basis of alignment data acquired by the image pickup of recognition hole 9e and recognition hole 12e by a first image pickup part, and a clamp member 9a is raised and aligned with the lower surface of the mask plate 12. On the basis of the results of the image pickup of the recognition hole 9e through the recognition hole 12e by a second image pickup part 17 while the clamp member 9a is in contact with the lower surface of a jig mask 12A, relative position data indicating the displacement amounts δx and δy of the recognition hole 12e and the recognition hole 9e while the clamp member 9a is contacted with the lower surface of the jig mask 12A is acquired and stored as calibration data indicating the positioning error caused by an upward movement by the substrate positioning part 1. <P>COPYRIGHT: (C)2013,JPO&INPIT |
