No-Contact Wet Processing Tool with Liquid Barrier

摘要

Embodiments of the present invention describe substrate processing tools and methods. A substrate on a support has a first portion and a second portion surrounding the first portion. An isolation unit including a body is positioned above the first portion of the substrate. The body includes at least one outlet on a lower surface thereof. At least one liquid pump is in fluid communication with the array of outlets. The at least one outlet is configured to drive liquid through the at least one outlet onto the substrate to form a liquid barrier around the first portion of the substrate.