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发明名称
ION GUN
摘要
申请公布号
JPH1092353(A)
申请公布日期
1998.04.10
申请号
JP19960247522
申请日期
1996.09.19
申请人
HITACHI LTD;HITACHI SCI SYST:KK
发明人
KIMURA MASASHI;MIYAZAWA KOICHI
分类号
H01J3/04;H01J37/02;H01J37/08;(IPC1-7):H01J37/02
主分类号
H01J3/04
代理机构
代理人
主权项
地址
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