发明名称 Mesa semiconductor device and method of manufacturing the same
摘要 The invention provides a mesa semiconductor device and a method of manufacturing the same which minimize the manufacturing cost and prevents contamination and physical damage of the device. An N− type semiconductor layer is formed on a front surface of a semiconductor substrate, and a P type semiconductor layer is formed thereon. An anode electrode is further formed on the P type semiconductor layer so as to be connected to the P type semiconductor layer, and a mesa groove is formed from the front surface of the P type semiconductor layer deeper than the N− type semiconductor layer so as to surround the anode electrode. Then, a second insulation film is formed from inside the mesa groove onto the end portion of the anode electrode. The second insulation film is made of an organic insulator such as polyimide type resin or the like. The lamination body made of the semiconductor substrate and the layers laminated thereon is then diced along a scribe line.
申请公布号 US8362595(B2) 申请公布日期 2013.01.29
申请号 US20080338686 申请日期 2008.12.18
申请人 SANYO SEMICONDUCTOR CO., LTD.;SANYO SEMICONDUCTOR MANUFACTURING CO., LTD.;SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC;SUZUKI AKIRA;SEKI KATSUYUKI;ODAJIMA KEITA 发明人 SUZUKI AKIRA;SEKI KATSUYUKI;ODAJIMA KEITA
分类号 H01L29/06;H01L27/082;H01L27/102;H01L29/70;H01L31/11 主分类号 H01L29/06
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