| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide silica particles that maintain the flowability of an attachment target. <P>SOLUTION: The silica particles have a volume-average particle diameter of from about 100 nm to about 500 nm, an average circularity degree of from about 0.5 to about 0.85, and an average value of the ratios of circle equivalent diameters Da of the silica particles obtained by a flat image analysis to maximum heights H of the silica particles obtained by a stereoscopic image analysis of more than 1.5 and less than 1.9. <P>COPYRIGHT: (C)2013,JPO&INPIT |
