| 摘要 |
The method includes first and second steps of placing an object in first and second media whose refractive indices are lower than that of the object, and of causing the reference light to enter the object to measure first and second transmitted wavefronts. When light rays entering a peripheral portion of the object and passing through a same point of the object are defined as first and second light rays, the method causes these light rays to proceed in directions mutually different to change an NA of the reference light such that the reference light after being transmitted through the object is brought closer to collimated light than that before entering the object. The method calculates an effective thickness of the object using geometric thicknesses thereof and calculates a refractive index distribution thereof using the first and second transmitted wavefronts and the effective thickness. |
