发明名称 FLOWMETER
摘要 <p>Provided is a flowmeter having improved corrosion resistance. This flowmeter has a configuration of having: a silicon substrate having a diaphragm having a heater formed thereon; an aluminum pad formed on the silicon substrate; an organic protection film laminated on the silicon substrate; and a molding resin that covers the silicon substrate. The diaphragm has an exposed portion that is exposed from the organic protection film, the silicon substrate has an adhesive film laminated thereon, said adhesive film having high adhesiveness to the molding resin, and the silicon substrate has a bonding surface where the molding resin and the adhesive film are bonded to each other, said bonding surface being disposed between the exposed portion and the aluminum pad.</p>
申请公布号 WO2013008273(A1) 申请公布日期 2013.01.17
申请号 WO2011JP03993 申请日期 2011.07.13
申请人 HITACHI AUTOMOTIVE SYSTEMS, LTD.;MATSUMOTO, MASAHIRO;NAKANO, HIROSHI;HANZAWA, KEIJI;ASANO, SATOSHI 发明人 MATSUMOTO, MASAHIRO;NAKANO, HIROSHI;HANZAWA, KEIJI;ASANO, SATOSHI
分类号 G01F1/692 主分类号 G01F1/692
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