CHARGED PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING METHOD

摘要

PURPOSE: A charged particle beam drawing apparatus and an article manufacturing method are provided to suppress an external magnetic field of an electron beam by including a magnetic shielding member which shields a magnetic field inputted to the inside of an electronic optical system housing through an opening. CONSTITUTION: A driving device(11) is fixed to a stage support member(4). A substrate stage body(6a) appropriately moves with the driving of the driving device. An optical system housing(3) emits charged particle beams to the substrate. A magnetic field shielding member(12) shields magnetic field inputted to the electronic optical system housing through an opening(9). A detector(13) measures a location of an X-Y direction of the substrate stage body.