| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of polishing a circumferential surface of a disc-like workpiece capable of correctly and efficiently polishing an outer peripheral surface of the disc-like workpiece 1, and a carrier 4 for a double-sided polishing machine usable for the same. <P>SOLUTION: This method of polishing a circumferential surface of a disc-like workpiece includes: a preparation process of preparing laminated cylinder bodies 3 each formed by laminating and integrating a plurality of disc-like workpieces 1; a polishing process of sandwiching the laminated cylinder bodies 3 between an upper surface plate 6 and a lower surface plate 7 by setting the axes A horizontal and polishing outer peripheral surfaces 31 thereof; and a division process of dividing each laminated cylinder body 3 having the peripheral surface polished into a plurality of disc-like workpieces 1. In the polishing process, the laminated cylinder body 3 is held rotatably around the axis A by a carrier 4 by keeping an attitude where the axis A direction thereof is tilted (at an angle α) with respect to a rotation tangent direction T7 of the lower surface plate 7. <P>COPYRIGHT: (C)2013,JPO&INPIT |
