| 摘要 |
A stage device to be used in a vacuum includes: a gas supply unit for generating a gas; a base member having four of upper, lower, right, and left surfaces; a slider formed in a frame shape surrounding the base member and having surfaces facing the respective surfaces of the base member, and disposed to be movable; and an air bearing configured to float the slider by supplying the gas to a space between the base member and the slider. The slider includes: an air chamber provided on the surface facing the base member for accumulating air, and the base member includes thereinside a slider-moving air flow passage configured to supply the gas from an inlet port for letting in the gas generated by the gas supply unit to an outlet port for supplying the gas to the air chamber of the slider. |
