PLASMA STERILLIZATION METHOD

摘要

PURPOSE: A plasma sterilizing method is provided to reduce the amount of used sterilization by injecting the germicide at a first pressure which is lower than atmospheric pressure. CONSTITUTION: A plasma sterilizing method which sterilizes bacteria by placing the bacterial inside a chamber comprises the following steps: injecting germicide in a chamber until the pressure becomes first pressure which is lower than the atmospheric pressure; injecting external air into the chamber until the pressure becomes second pressure which is higher than the atmospheric pressure; reducing pressure inside the chamber; and generating plasma in the chamber. [Reference numerals] (AA,CC) Temperature; (BB,DD) Pressure; (EE) Pre-heat temperature; (FF) Second pressure; (GG) Atmosphere; (HH) First pressure; (II) Third pressure; (JJ) Vacuum pressure; (KK) Start; (ST12) Preheat