发明名称 |
HEAT TREATMENT FURNACE AND HEAT TREATMENT APPARATUS |
摘要 |
A heat treatment furnace includes: a processing vessel configured to accommodate therein at least one object to be processed; a cylindrical heat insulating member covering a periphery of the processing vessel; and a heater disposed along an inner circumferential surface of the heat insulating member. The heater includes strip-shaped corrugated heater elements disposed along the inner circumferential surface of the heat insulating member, each of the heater elements having valley portions protruding outward and mountain portions protruding inward. |
申请公布号 |
US2012329002(A1) |
申请公布日期 |
2012.12.27 |
申请号 |
US201213527150 |
申请日期 |
2012.06.19 |
申请人 |
KOBAYASHI MAKOTO;YAMAGA KENICHI;SASAKI AKIRA;IKEDA DAISUKE;KOIKE TAKAHIRO;TOKYO ELECTRON LIMITED;NICHIAS CORPORATION |
发明人 |
KOBAYASHI MAKOTO;YAMAGA KENICHI;SASAKI AKIRA;IKEDA DAISUKE;KOIKE TAKAHIRO |
分类号 |
B01J3/04 |
主分类号 |
B01J3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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