摘要 |
<P>PROBLEM TO BE SOLVED: To provide a long life X-ray tube having an X-ray shield member 110 which passes an electron beam through an electron passing hole 111 to a target 108, by reducing the deterioration caused by positive ions generated by electrons colliding against gas molecules, produced from the target 108 in the electron passing hole 111 by desorption phenomenon due to electron beam irradiation, and being accelerated to collide against a cathode 101. <P>SOLUTION: Separately from an aperture on the cathode 101 side of an electron passing hole 111, an exhaust path 112 interconnecting the inside and outside of the electron passing hole 111 is provided so as to facilitate diffusion of gas molecules produced in the electron passing hole 111 to the outside thereof. <P>COPYRIGHT: (C)2013,JPO&INPIT |