发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 <p>PURPOSE: A semiconductor device and a manufacturing method thereof are provided to reduce the size of a bit line contact by forming a spacer of prescribed thickness on a bit line contact hole sidewall. CONSTITUTION: A semiconductor substrate is equipped in an active area(100A) defined with an element isolation film(110). A gate line(120) extended to one-way direction is formed in the active area. An insulating layer is formed on the semiconductor substrate which forms the gate line. A bit line contact hole which exposes a bit line contact area(C1) by passing through the insulating layer is formed. A spacer is formed on a sidewall of the bit line contact hole.</p>
申请公布号 KR101215952(B1) 申请公布日期 2012.12.27
申请号 KR20110060711 申请日期 2011.06.22
申请人 SK HYNIX INC. 发明人 CHO, HYUN SHIK
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
主权项
地址