| 摘要 |
<p>The invention relates to a holding device (1) for holding an arrangement (7) of a plurality of wafers, the holding device (1) comprises:
a receiving space (2) for receiving said arrangement (7) of a plurality of wafers,
at least two holding members (3), which are arranged on opposite sides of said receiving space (2), and
a support structure (4), on which the holding members (3) are arranged,
wherein at least one of the holding members (3) is movable with respect to said support structure (4) to bring the holding device (1) from a releasing state to a holding state, in which a holding force is applied by the holding members (3) against the sides of said wafers.</p> |
